Radiomeasuring pressure transducers from MEMS sensing element
Keywords:
radiomeasuring pressure transducer, negative resistance, frequency output signal, MEMS sensorAbstract
This paper presents the research of radiomeasuring pressure transducer from reactive properties of bipolar transistors with MEMS sensing element. Analytical dependences of transformation function and sensitivity equation. Theoretical and experimental studies have shown that the sensitivity developed pressure transducers 650 Hz/kPa.
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Published
2016-05-28
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Section 1 Information technologies in technical and special purpose systems, information technologies in society, education, medicine, economics, management, ecology and law